| 摘要 |
PROBLEM TO BE SOLVED: To provide an irregular shape forming method highly accurately and easily forming irregular shapes having a plurality of unit shapes which have the same surface shape and different projecting distances from a reference surface, and to provide a method for manufacturing an optical element array and a microlens array. SOLUTION: The irregular shape forming method includes: a shape exposure process for exposing each region 21 of a photoresist layer 20 by using a gray scale mask 30 for a shape having transmitted light distribution corresponding to the surface shapes of a plurality of unit shape parts 23 which have the same surface shape and different distances from the reference surface; a distance exposure process for exposing each region 21 of the photoresist layer 20 by using a gray scale mask 40 for a distance having the transmitted light distribution corresponding to the distance from the reference surface of each unit shape part 23; and a developing process, when the plurality of unit shape parts 23 are formed on the photoresist layer 20, according to the plurality of unit lens parts 11 of the microlens array 10. COPYRIGHT: (C)2010,JPO&INPIT
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