发明名称 MULTI-INLET VACUUM PUMP
摘要 The invention relates to a multi-inlet vacuum pump having a first pump device (10) provided with a first rotor element (18) comprising several first rotor disks (20) which are arranged successively in the conveying direction (36), and a second pump device (12) provided with a second rotor element (26) comprising several second rotor disks (28) which are arranged successively in the conveying direction (36). The diameter of the second rotor disks (28) is at least partially greater than the diameter of the first rotor disks (20). The claimed multi-inlet vacuum pump also comprises a main inlet (32) through which a first fluid flow (34) is suctioned by the first pump device (10) and is conveyed in the direction of the second pump device ( 12). Furthermore, said pump comprises an intermediate inlet (38) through which a second fluid flow (40) is suctioned by the second pump device (12) and is conveyed in the direction of a pump outlet. Both fluid flows (34, 40) are joined inside the second pump device (12), in particular between two adjacent rotor disks (28) of the second pump device (12).
申请公布号 WO2010097384(A2) 申请公布日期 2010.09.02
申请号 WO2010EP52282 申请日期 2010.02.23
申请人 OERLIKON LEYBOLD VACUUM GMBH;BEYER, CHRISTIAN;HENRY, MARKUS;ENGLAENDER, HEINZ 发明人 BEYER, CHRISTIAN;HENRY, MARKUS;ENGLAENDER, HEINZ
分类号 F04D19/04 主分类号 F04D19/04
代理机构 代理人
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