发明名称 MASS ANALYSIS MAGNET FOR A RIBBON BEAM
摘要 A ribbon beam mass analyzer having a first and second solenoid coils and steel yoke arrangement. Each of the solenoid coils have a substantially "racetrack" configuration defining a space through which an ion ribbon beam travels. The solenoid coils are spaced apart along the direction of travel of the ribbon beam. Each of the solenoid coils generates a uniform magnetic field to accommodate mass resolution of wide ribbon beams to produce a desired image of ions generated from an ion source.
申请公布号 WO2010056823(A3) 申请公布日期 2010.09.02
申请号 WO2009US64159 申请日期 2009.11.12
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES;BENVENISTE, VICTOR, M.;BUFF, JAMES, S.;SINCLAIR, FRANK;OLSON, JOSEPH, C. 发明人 BENVENISTE, VICTOR, M.;BUFF, JAMES, S.;SINCLAIR, FRANK;OLSON, JOSEPH, C.
分类号 H01L21/265 主分类号 H01L21/265
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