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发明名称
RUNDLÄUFERMASCHINE FÜR CVD-BESCHICHTUNGEN
摘要
申请公布号
DE50312906(D1)
申请公布日期
2010.09.02
申请号
DE20035012906
申请日期
2003.05.26
申请人
SCHOTT AG
发明人
BEHLE, STEPHAN;LUETTRINGHAUS-HENKEL, ANDREAS;ARNOLD, GREGOR;BICKER, MATTHIAS;KLEIN, JUERGEN
分类号
C23C16/54;C23C16/04
主分类号
C23C16/54
代理机构
代理人
主权项
地址
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