| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a belt conveying and polishing apparatus preventing any excessive polishing of a substrate end, uniformizing the surface of a workpiece, and enhancing the yield of products in a polishing machine for polishing a color filter in which a large number of products are assembled to a large glass substrate. <P>SOLUTION: The belt conveying and polishing apparatus comprises at least the polishing head of a compound structure of a rectangular rigid plate and the polishing pad of an elastic body arranged on its lower surface, a belt conveying mechanism for horizontally conveying a color filter (workpiece) to be polished in a loaded state on a belt with its color filter side upwardly, and a polishing mechanism oscillated while pressing the polishing pad against the surface of the horizontally conveyed workpiece. The belt conveying and polishing apparatus has a clearance adjusting means for setting the height of the polishing head to the conveying belt to the specified value. <P>COPYRIGHT: (C)2010,JPO&INPIT |
