发明名称 PROBE, OPTICAL CRYSTAL, METHOD OF MANUFACTURING PROBE, AND METHOD OF MANUFACTURING OPTICAL CRYSTAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a probe capable of performing measurement with high sensitivity and high spatial resolution in a microarea in which electronic devices are mounted at high-density by suppressing the spread of light propagated in an optical crystal to reduce a loss of modulation light, and to provide the optical crystal, a method of manufacturing the probe, and to provide a method of manufacturing the optical crystal. Ž<P>SOLUTION: The probe using laser light includes the optical crystal 1 comprising any of an electro-optical material and a magneto-optical material. In the optical crystal 1, at least three or more spacing rods 2 are provided around a light propagation region 10. The spacing rods 2 are provided so that a center-to-center distance with the adjacent spacing rod may be a distance for suppressing the spread of a laser light propagated in the light propagation region 10. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010190710(A) 申请公布日期 2010.09.02
申请号 JP20090034999 申请日期 2009.02.18
申请人 NEC CORP 发明人 IWANAMI MIZUKI
分类号 G01R31/302;G01R29/08 主分类号 G01R31/302
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