| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray microanalyzer capable of easily comparing spectra with each other. Ž<P>SOLUTION: The X-ray microanalyzer irradiating a sample 19 with a finely narrowed electron beam, making characteristic X-rays to be emitted from the sample 19 incident to a dispersive crystal 9, detecting the dispersed characteristic X-rays with a detector 11, and qualifying or quantifying elements contained in the sample as the spectra indicating a wavelength on the axis of abscissa and an X-ray intensity on the axis of ordinates, includes a setting means 29 for predetermining an electron beam irradiation current, a characteristic X-ray counting time, and a spectrum display scale as conditions; and a computation display means 29 for normalizing the irradiation current and the counting time to the predetermined conditions to display, when the irradiation current and the counting time have changed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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