| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece holder capable of realizing highly accurate polishing with no maintenance for a long time without being influenced by a size of a workpiece. Ž<P>SOLUTION: In this workpiece holder H1, wherein a stick 1 is connected to a back face of a holder 5 holding a lens 3 via a stick ball 22 and is tiltably held, an air passage 10 and an air passage 5e for applying a positive pressure air 13 and a negative pressure air 14 are provided to the stick 1 and the holder 5, and a groove-shaped air storage 8 is provided around the stick ball 22. A check valve 16 is arranged to the air passage 5e of the holder 5. In transporting the lens 3, the negative air 14 is applied to a workpiece holding recessed part 5a through the air passage 10 and the air passage 5e, so as to adsorb and hold the lense 3. In processing, the positive air 13 is introduced to the groove-shaped air storage 8, so as to reduce friction resistance by making the stick ball 2 floated from the holder 5. Therefore, the holder 5 holding the lens 3 rotates following a polishing plate 4 reliably. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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