| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for a superconductor precursor film enabling coating of superconductor precursor solution on a linear substrate with high uniformity and stability and to provide a manufacturing method for the superconductor precursor film. Ž<P>SOLUTION: The manufacturing apparatus for the superconductor precursor film and the manufacturing method for the superconductor precursor film that can be carried out by the manufacturing apparatus are characterized by a substrate traveling means for traveling of the linear substrate, a T die which is arranged above the traveling linear substrate to form the superconductor precursor solution film on the linear substrate by ejecting the superconductor precursor solution from its ejecting section, a solution supplying means for supplying the superconductor precursor solution to the T die; a film thickness detector which is arranged on the downstream side of the T die to measure the thickness of the superconductor precursor solution film, and a coating quantity control section for controlling the quantity of the superconductor precursor solution that is ejected from the T die based on the measured value by the film thickness detector. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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