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发明名称
Method for manufacturing spiral piezoelectric actuator by use of thermoplastic co-extrusion and spiral piezoelectric actuator and micromini ultrasonic motor manufactured thereby
摘要
申请公布号
KR100979522(B1)
申请公布日期
2010.09.02
申请号
KR20070080422
申请日期
2007.08.10
申请人
发明人
分类号
H01L41/16;B06B1/06;H01L41/18
主分类号
H01L41/16
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