| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner capable of sustaining proper impurity removal effects over a long time and obtaining a high throughput. <P>SOLUTION: The aligner equipped with a chamber 2 for housing an aligner body 3 and a cleaning means 5 for cleaning air inside the chamber 2, includes an outdoor air introduction means 20 provided with a movable mechanism 21, capable of changing the position of an outdoor air inlet port 26 for introducing outdoor air inside the chamber 2 in a vertical direction. <P>COPYRIGHT: (C)2010,JPO&INPIT |
