| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure bearing device increasing supply pressure to a radial bearing surface and improving gas discharge performance. SOLUTION: The static pressure gas bearing device 10 includes: a bearing block 11 having radial bearing surfaces 13A, 13B, a thrust bearing surface 13C, gas supply holes for the radial bearings 14A, 14B, a gas supply hole for the thrust bearing 14C, and an intermediate gas discharge hole 15B; a gas supply device 23 supplying pressurized gas to a bearing gap; and a gas discharge device 24 sucking gas from the intermediate gas discharge hole 15B. COPYRIGHT: (C)2010,JPO&INPIT |
