| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device that conveys a substrate at a low position from an installation floor for the device and has a simple structure as the whole of the device. SOLUTION: The substrate conveying device 1 includes a hand member 30, a longitudinal slide mechanism 40, and a lateral slide mechanism 50. The longitudinal slide mechanism 40 has a fixed rail 41 for longitudinal sliding fitted to a swivel base member 20 and a movable rail 42 for lateral sliding fitted to the fixed rail 41 for longitudinal sliding. The lateral slide mechanism 50 has a fixed rail 51 for lateral sliding fitted to the swivel base 20, and a movable rail 52 for longitudinal sliding fitted to the fixed rail 51 for lateral sliding. The longitudinal slide mechanism 40 is arranged at one side part with respect to the hand member 30, and the lateral slide mechanism 50 is arranged on the other side part with respect to the hand member 30. COPYRIGHT: (C)2010,JPO&INPIT |
