| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromechanical element for reducing the size and increasing the switching speed, and a method for manufacturing the same. SOLUTION: The micromechanical element 5 has a switching element 6 to be a movable electrode for bridging two contact electrodes 3a, 3b, and switching electrodes 2a, 2b which move the switching element 6 in the vertical direction by an electrostatic force with respect to the contact electrodes 3a, 3b, and maintain the switching element in two stable states of the state contacting with and the state separating from the contact electrodes 3a, 3b. The switching electrodes 2a, 2b are disposed between the contact electrodes 3a, 3b and on the upper side thereof. COPYRIGHT: (C)2010,JPO&INPIT
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