| 摘要 |
PROBLEM TO BE SOLVED: To eliminate an error in a thin film thermocouple in temperature measurement caused by a difference in behavior between an extremely minute material and a bulk material of the same kind of the minute material. SOLUTION: A temperature measuring element 1 includes a second thermocouple in the vicinity of connection parts 20 and 21 of respective external metals 13 and 14 for signal fetch of a first thermocouple of the thin film thermocouple. The second thermocouple is composed of the same component as that of the first thermocouple, and external metal wires 15 and 16 of equal length are connected the second thermocouple. The error at the time of temperature measurement caused by connecting the thin film thermocouple with the bulk material is reduced by an operation by a specific formula using the temperature measuring element 1. COPYRIGHT: (C)2010,JPO&INPIT
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