| 摘要 |
A structure that includes a rectifier further comprises a semiconductor region of a first conductivity type, and trenches that extend into the semiconductor region. A dielectric layer lines lower sidewalls of each trench but is discontinuous along a bottom of each trench. A silicon region of a second conductivity type extends along the bottom of each trench and forms a PN junction with the semiconductor region. A shield electrode in a bottom portion of each trench is in direct contact with the silicon region. A gate electrode extends over the shield electrode. An interconnect layer extends over the semiconductor region and is in electrical contact with the shield electrode. The interconnect layer further contacts mesa surfaces of the semiconductor region between adjacent trenches to form Schottky contacts therebetween.
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