ALIGNMENT FOR EDGE FIELD NANO-IMPRINTING,申请号WO2009US05869-传众专利搜索

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发明名称	ALIGNMENT FOR EDGE FIELD NANO-IMPRINTING
摘要	Systems and methods for alignment of template and substrate at the edge of substrate are described.
申请公布号	WO2010053519(A3)	申请公布日期	2010.09.02
申请号	WO2009US05869	申请日期	2009.10.29
申请人	MOLECULAR IMPRINTS, INC.	发明人	CHOI, BYUNG-JIN;NIMMAKAYALA, PAWAN KUMAR;SCHUMAKER, PHILIP, D.
分类号	G03F9/00	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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