A METALLIZATION SYSTEM OF A SEMICONDUCTOR DEVICE INCLUDING METAL PILLARS HAVING A REDUCED DIAMETER AT THE BOTTOM
摘要
<p>In a metallization system of a complex semiconductor device, metal pillars (271) such as copper pillars may be formed in a nail-like configuration in order to reduce the maximum mechanical stress acting on the metallization system while providing a required contact surface for connecting to the package substrate. The nail-like configuration may be obtained on the basis of appropriately configured resist masks.</p>
申请公布号
WO2010097191(A1)
申请公布日期
2010.09.02
申请号
WO2010EP01092
申请日期
2010.02.22
申请人
ADVANCED MICRO DEVICES, INC.;FEUSTEL, FRANK;FROHBERG, KAI;WERNER, THOMAS;AMD FAB 36 LIMITED LIABILITY COMPANY & CO. KG