Verfahren, System sowie computerlesbare Programmspeichereinrichtung für eine produktbezogene Rückkopplung für Prozesssteuerung

摘要

A method, apparatus, and a system for performing a product feedback for process control are provided. Metrology data relating to a first workpiece is received. An end of line parameter relating to the first workpiece is received. The end of line parameter is correlated with the metrology data. A process control associated with a plurality of processes to be performed on a second workpiece is adjusted based upon the correlating.