AIR-COOLED ELECTRODE FOR PLASMA CLEANING

摘要

PURPOSE: An air-cooled electrode for the treatment of plasma is provided to maximize cooling efficiency by directly cooling the inside of an electrode. CONSTITUTION: An influx part(4) guides cooling air towards the inside of an electrode. A tunnel path circulates the cooling air which flows from the influx part. A discharging part(5) discharges the cooling air which passes through the tunnel path to the outside. An air distribution hole comprises an air line connecting part in order to supply the cooling air to both ends of the air distribution hole. A discharge pipe(8) is installed in the lower part of the discharging part. A heat radiation fan is combined in one side of the discharge pipe.