| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece having reduced cross axis sensitivity, and to provide a piezoelectric vibrator mounting the piezoelectric vibration piece, and an acceleration sensor. <P>SOLUTION: The piezoelectric vibration piece includes a cantilevered vibration arm 14 extended in a first direction, a base section 12 for cantilevering the vibration arm, a first-side electrode film 36 for bending and vibrating the vibration arm 14 in a second direction vertical to the first direction, a second-side electrode film 38, a first inner surface electrode film 40, a second inner surface electrode film 42, a bottom face electrode film 44, a first excitation electrode film 46, a second excitation electrode film 48, a third excitation electrode film 50, an extraction electrode film 52, and a connection electrode film 54. In this case, the vibration arm 14 includes an adjustment section for adjusting rigidity bending in a third direction vertical to the first and second directions. The adjustment section is a groove 26 provided along a free-end direction of the vibration arm 14 from a base-part side on a face facing the third direction of the vibration arm. <P>COPYRIGHT: (C)2010,JPO&INPIT |
