| 摘要 |
<P>PROBLEM TO BE SOLVED: To continue a line width measurement by assuring a light quantity which is necessary for a measurement by controlling a transmittance of a light source according to a decrease of the light quantity, by constructing a system for measuring the decrease of a lamp light quantity within the measuring system, since the light quantity required for measuring can not be assured when the light quantity of the lamp is decreased. Ž<P>SOLUTION: The decrease of the light quantity of the lamp is measured by using an image signal of CCTV camera, while providing a reflection mirror in an optical path. Also, the illuminance characteristics of a lighting device are memorized in an image processing unit. Using this information, the light quantity of the lighting device is controlled so as to obtain the light quantity required for the measurement. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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