METHODS FOR FABRICATING HIGH ASPECT RATIO PROBES AND DEFORMING HIGH ASPECT RATIO NANOPILLARS AND MICROPILLARS
摘要
Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.
申请公布号
WO2010099220(A2)
申请公布日期
2010.09.02
申请号
WO2010US25261
申请日期
2010.02.24
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY;HENRY, MICHAEL D.;HOMYK, ANDREW P.;SCHERER, AXEL;TOMBRELLO, THOMAS A.;WALAVALKAR, SAMEER
发明人
HENRY, MICHAEL D.;HOMYK, ANDREW P.;SCHERER, AXEL;TOMBRELLO, THOMAS A.;WALAVALKAR, SAMEER
