ORGANIC COMPOUND STEAM GENERATOR AND APPARATUS FOR PRODUCING ORGANIC THIN FILM

摘要

Provided is technology with which organic compound steam generated inside a generating tank does not flow back into an inner connecting pipe through which organic compound is fed to the generating tank. An apparatus (1) for producing an organic thin film comprises a reservoir (31) in which organic materials are disposed, a generating tank (33) for heating the organic materials and generating steam from the organic materials, and a transport apparatus (32) for feeding the organic materials inside the reservoir (31) to the generating tank (33). The transport apparatus (32) has an outer connecting pipe (37), which forms an airtight connection between the atmosphere inside the reservoir (31) and the atmosphere inside the generating tank (33); a quartz inner connecting pipe (38), which is disposed inside the outer connecting pipe (37) and moves organic materials from the inside of the reservoir (31) to the inside of the generating tank (33); and a gas introduction port (42) for the introduction of gas into the inner connecting pipe (38).