| 摘要 |
PURPOSE: A moving cart for semiconductor equipment with a shock absorbing function is provided to effectively absorb shaking occurred by a damping spring and to maintain horizontality by controlling the height of a ball caster. CONSTITUTION: A moving cart(10) for semiconductor equipment with a shock absorbing function comprises a base plate(100), ball casters(200), a damping plate(300), damping springs(400), and fixing bolts(500). The base plate has caster joints(110), first spring mounting grooves(120), and a horizontal system(130). The ball casters are coupled to the caster joints of the base plate. A separation preventing groove(310) is formed on the top of the damping plate. Multiple second spring mounting grooves(320) are formed in the damping plate. The damping springs are placed in the first and second spring mounting grooves. The fixing bolts are inserted into the first and second spring mounting grooves.
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