SEMICONDUCTOR PHYSICAL QUANTITY SENSOR

摘要

PROBLEM TO BE SOLVED: To suppress damage of a member for preventing sticking of a movable electrode to a glass substrate constituting a fixed part.

SOLUTION: In a capacitive sensor including the movable electrode 5 comprising a semiconductor movable in response to externally applied force and the glass substrate constituting an insulating layer 21 fixedly arranged so as to be disposed opposite the movable electrode 5, the capacitive sensor includes a plurality of convex sticking prevention members 24 formed on the glass substrate and supporting the movable electrode 5 when the movable electrode 5 is moved and is in contact with the glass substrate. The convex sticking prevention members 24 are formed by blast processing for forming recessed parts on the glass substrate by selectively removing the glass substrate and wet etching processing for forming the plurality of convex sticking prevention members by selectively removing the recessed parts formed on the glass substrate.

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