FINE PATTERN FORMING MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a fine pattern forming member used for forming a fine pattern having fine through holes each of which has a diameter of a several-ten nm order as constituent elements.

SOLUTION: In the fine pattern forming member wherein inner parts of the micro pore through-holes of an aluminum anodically oxidized film having the plurality of micro pore through-holes are filled with resin compositions which can be developed by using an organic solvent, the exposure of the member is performed so that a desired pattern is formed and then development treatment using the organic solvent is performed to form the fine pattern on the member.

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