| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor testing device having a voltage impression current measuring function shortening a testing time by preventing lowering of a response rate while maintaining the minimum phase margin even if a bypass capacitor having any capacitance value is connected to a power source pin of a device to be measured. Ž<P>SOLUTION: The semiconductor testing device includes the function of measuring the current by impressing a predetermined voltage to the power source pin of the device to be measured, wherein the capacitance value of the bypass capacitor connected to the power source pin is measured before the start of the measurement, the response characteristic of the power supply unit is controlled so that the minimum phase margin is obtained by changing the value of resistance or capacitance for phase compensation in accordance with the measurement result, and the current measurement starting timing is optimized in accordance with the measured capacitance value. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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