| 摘要 |
PROBLEM TO BE SOLVED: To provide an application method and an application system preventing the density increase of a coating liquid even when the coating liquid has two or more solvents and stably forming a coating film of a uniform film thickness without irregularities by a simple method and configuration. SOLUTION: Evaporation amounts per unit time for each of solvents from an application apparatus and a total evaporation amount in which the evaporation amounts are totaled are calculated by simulation using a simulation means, and the solvents with amounts equivalent to the calculated evaporation amounts for each of the solvents are replenished to the coating liquid. Further, when a result by the simulation is different from an actual system, application is performed with the coating liquid to which the solvent of the amount calculated by the simulation is replenished, a coating liquid density is calculated, and on the basis of the calculated coating liquid density, a difference between the density of the coating liquid and a reference coating liquid density stipulated beforehand and the correction amount of the solvent equivalent to the difference are calculated, and the replenishing amount of the solvent based on the simulation is changed on the basis of the correction amount of the solvent. COPYRIGHT: (C)2010,JPO&INPIT
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