| 摘要 |
PROBLEM TO BE SOLVED: To provide an ACF thermocompression bonding apparatus for FPD for accurately measuring the temperature of a pressure head and having high reliability. SOLUTION: The ACF thermocompression bonding apparatus for pressing an ACF by using a heated compression blade 11 and fixing the ACF on a substrate of an FPD includes: a heater block 20 for heating the compression blade by a heater; a fitting hole for a sheath-incorporated thermocouple 21, which is formed in the heater block; and the sheath-incorporated thermocouple arranged in the fitting hole: wherein, a base of the sheath-incorporated thermocouple is screwed and the screwed portion is stuck and fixed with a heat-resistant inorganic adhesive 24. COPYRIGHT: (C)2010,JPO&INPIT
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