| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the loss of a beam current and improve throughput by eliminating the necessity of blanking. SOLUTION: Moving speed Vsub in a circumference direction of a substrate and beam deflection speed Vbeam are made higher in a zone R2 where drawing pattern density is low, and are made lower in zones R1, R3 where the drawing pattern density is high. The blanking performed by a blanking control unit 31 is thereby eliminated. In a zone R6 where it is desired that a thick drawing pattern is formed in a radial direction, an optimum drawing speed setting means 47 sets the drawing speed Vexp to be lower than those in zones R4, R5 and the moving speed Vsub is made relatively lower than that when the drawing speed Vexp is substantially constant. Thus, a thick drawing is obtained. COPYRIGHT: (C)2010,JPO&INPIT
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