| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of producing a transparent conductive substrate, by which there can be easily produced a transparent conductive substrate having good conductivity and transparency and including a titanium oxide-based transparent conductive film patterned into a desired shape. Ž<P>SOLUTION: In this method, precursor liquid for forming a titanium oxide-based transparent conductive film is applied to a transparent substrate and dried at a temperature not more than 350°C, and the thus-obtained coating film is subjected to etching and then to annealing. The precursor liquid for forming a titanium oxide transparent conductive film preferably contains (A) a reaction product obtained by reaction of a titanium compound with hydrogen peroxide and (B) a reaction product obtained by reaction of a niobium compound or a tantalum compound with hydrogen peroxide. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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