| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat treatment device that freely adjusts an output waveform of luminous output for radiating light onto a substrate from a plurality of flash lamps. Ž<P>SOLUTION: There is a capacitance difference between capacitors 93a and 93b and there is an inductance difference between coils 94a and 94b. Also, there is a difference in applied voltage between power supply units 95a and 95b. This causes an output waveform of the luminous output of a flash lamp FL(A) to differ from that of the luminous output of a flash lamp FL(B). Light emissions of different output waveforms are superimposed and the output waveform of the luminous output of light with which the substrate is irradiated from the entire of a plurality of flash lamps is freely adjusted by uniformly diffusing and arranging the flash lamp FL(A) and flash lamp FL(B), and also properly shifting the light emitting timing thereof. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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