| 摘要 |
PURPOSE: A method and an apparatus for measuring the form of a mirror reflecting surface are provided to recover the form the sheet with a mirror reflecting surface in a given direction. CONSTITUTION: The reflection of a planar geometric pattern displayed on the surface of the target(140) located on a target plane from a mirror reflecting surface(124) located on a measuring plane(122) is made. The image of the reflection is recorded on an imaging plane(154). The locations of the multiple spots on the mirror reflecting surface to the imaging plane are determined. A first relation between a specific location on a reflecting image and a specific location on a pattern is determined. The form of the mirror reflecting surface is determined from the first relation and a second relation including the surface profile of the mirror reflecting surface using the locations of the multiple spots, as an initial condition. |
