| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic probe with high productivity, and to provide a method of manufacturing the same. <P>SOLUTION: A piezoelectric film 3 and a backing material 5 are formed by the same aerosol deposition method, so the backing material can be formed in a short time as compared with other methods of forming a backing material by mixing powder of tungsten and ferrite, etc., with an inflexible epoxy resin and so on, thereby enhancing the productivity. <P>COPYRIGHT: (C)2010,JPO&INPIT |
