| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an analog input and output circuit and a vacuum processing apparatus capable of automatically performing correction of all the analog inputs and outputs via a single reference voltage adjustment, in order to solve the problem of requiring a different correction value for each channel which accurately controls the analog input and output, due to the difference in the on-resistances of switches for respective channels of an analog multiplexer. Ž<P>SOLUTION: The analog input output circuit includes: an A/D converter 505 for converting an input analog signal into a digital signal; a D/A converter 506 for converting the digital signal into an analog signal; a computing unit for computing a first correction value 604 with respect to a digital signal of the input signal from the A/D converter and a second correction value 606, with respect to a digital signal output to the D/A converter using the first correction value; and a control unit for outputting control signals from the D/A converter 506 using the first correction value 610 and the second correction value 612. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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