发明名称 MOUNTED TRANSISTOR AND METHOD OF PRODUCING SAME
摘要 <p>A method of producing a mounted transistor comprising: a step (a) of forming a transistor (100); a step (b) of polishing a formed substrate (101); and a step (c) of securing the transistor (100), the formed substrate (101) of which is polished, to a holding substrate (200). The step (a) comprises sequentially forming a first semiconductor layer and a second semiconductor layer with a band gap larger than the first semiconductor layer on the main surface of the formed substrate (101). The step (b) comprises polishing the surface opposite of the main surface of the formed substrate (101). The step (c) comprises securing the transistor (100) on the holding substrate (200) in a state in which stress is applied to the formed substrate (101) in a direction that makes warping of the formed substrate (101) become smaller.</p>
申请公布号 WO2010097859(A1) 申请公布日期 2010.09.02
申请号 WO2009JP05404 申请日期 2009.10.16
申请人 PANASONIC CORPORATION;TANAKA, KENICHIRO;UEDA, TETSUZO;MATSUO, HISAYOSHI;HIKITA, MASAHIRO 发明人 TANAKA, KENICHIRO;UEDA, TETSUZO;MATSUO, HISAYOSHI;HIKITA, MASAHIRO
分类号 H01L21/338;H01L21/52;H01L29/778;H01L29/812 主分类号 H01L21/338
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