Method and device for creating image contrast with the use of phase shifting

摘要

The production method involves producing anamorphic image (6,6') of axial rays using first quadrupole fields disposed upstream of the anamorphic image, and effecting a relative phase shift between a region around the electron beam of zeroth order and higher order of diffraction. The anamorphic image is corrected using a downstream second quadrupole field, and a magnification (M) of the intermediate image (5) is appropriately selected such that the axial rays enter first quadrupole fields at a slope 1/ M. An independent claim is included for a production device for image contrast by phase shifting in electron optics.