发明名称 METHOD AND APPARATUS FOR PLATING SOLUTION ANALYSIS AND CONTROL
摘要 <p>A plating system comprises a plating solution and an apparatus for control of the plating solution, the apparatus including a Raman spectrometer for measurement of organic components, a visible light spectrometer for measurement of metallic components, and a pH probe. The plating solution can be sampled continuously or at intervals. Dosing of the plating solution adjusts for components consumed or lost in the plating process. The method of dosing is based on maintaining a desired composition of the plating solution.</p>
申请公布号 KR20100096239(A) 申请公布日期 2010.09.01
申请号 KR20107015301 申请日期 2008.12.12
申请人 LAM RESEARCH CORPORATION 发明人 LI NANHAI;KOLICS ARTUR;JAIN AMAN;RULKENS RON;BIRTWHISTLE DARIN;CHAN CHEE
分类号 C25D21/14;C25D21/16;G01N27/42 主分类号 C25D21/14
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