发明名称 SEMICONDUCTOR WAFER AND SEMICONDUCTOR DEVICE
摘要 Disclosed is a semiconductor wafer which is characterized in that a resin layer composed of a resin composition containing a cyclic olefin resin (A) having an epoxy group and a photoacid generator (B) is arranged on a surface on which a circuit element is formed, and the residual stress of the resin layer after curing is 1-20 MPa. Also disclosed is a semiconductor device comprising such a semiconductor wafer.
申请公布号 EP1804291(A4) 申请公布日期 2010.09.01
申请号 EP20050795609 申请日期 2005.10.20
申请人 SUMITOMO BAKELITE COMPANY, LIMITED 发明人 KUSUNOKI, JUNYA;HIRANO, TAKASHI
分类号 H01L23/29;G03F7/038 主分类号 H01L23/29
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