发明名称 |
SEMICONDUCTOR WAFER AND SEMICONDUCTOR DEVICE |
摘要 |
Disclosed is a semiconductor wafer which is characterized in that a resin layer composed of a resin composition containing a cyclic olefin resin (A) having an epoxy group and a photoacid generator (B) is arranged on a surface on which a circuit element is formed, and the residual stress of the resin layer after curing is 1-20 MPa. Also disclosed is a semiconductor device comprising such a semiconductor wafer. |
申请公布号 |
EP1804291(A4) |
申请公布日期 |
2010.09.01 |
申请号 |
EP20050795609 |
申请日期 |
2005.10.20 |
申请人 |
SUMITOMO BAKELITE COMPANY, LIMITED |
发明人 |
KUSUNOKI, JUNYA;HIRANO, TAKASHI |
分类号 |
H01L23/29;G03F7/038 |
主分类号 |
H01L23/29 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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