APPARATUS FOR PROBING FLAT PANEL DISPLAY

摘要

PURPOSE: A probe device for the inspection of a flat display is provided to accurately measure the correlation due to temperature and light. CONSTITUTION: A thermo stream injecting unit(6) is installed in a probe head. The unit heats and cools the contact unit of a probe pin and a circuit pattern. A plurality of backlight modules(7) irradiate light to the back side of a substrate and irradiate light to the circuit pattern. A controller(9) outputs the temperature measuring time point of a substrate by calculating the correlation of specific temperature by a thermostream spraying part and the reference temperature of a measurement point.