| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic heater capable of preventing the resistance of a heater electrode from rising even under a severe endurance condition with a repeated temperature rise and drop, and its manufacturing method. <P>SOLUTION: The ceramic heater 1 is composed of a heater substrate 3 made of ceramic, and a heater electrode 2 made of a conductive material and a material common to ceramic and provided in or on the surface of the heater substrate. Sintering the activity of the material common to ceramic which composes the heater electrode 2 is lower than the sintering activity of the ceramic which composes the heater substrate 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
