Acoustic wave device physical parameter sensor.

摘要

An acoustic wave sensor employs an electromagnetic device (EMD) to transduce and amplify the response of an impedance element to a physical measurand. A measurand is defined as a physical parameter being quantified by measurement. One embodiment uses a magnetic field sensor employing a microelectromechanical system (MEMS) capacitor to affect a change in the response of a SAW filter.