SCALE INDEX ELEMENT, BOARD WITH THE ELEMENT, METHOD FOR FORMING THE ELEMENT AND METHOD AND DEVICE FOR MEASURING THE DEFORMATION OF A BOARD USING THE ELEMENT

摘要

PURPOSE: A scale index device, a substrate thereof, a forming method thereof, a deformation measuring method thereof, and a device thereof are provided to reduce processing costs by directly checking the thermal deformation of a substrate during a substrate manufacturing process. CONSTITUTION: A scale index device is embedded into a substrate. The scale index device comprises a register and at least one electrode pair. The register is formed on the upper side of the polymer core of the substrate. The electrode pair is contacted with the upper side of the register. The electrode pair is exposed to the surface of the substrate. The register is made of Ni-Cr alloy or Ni-Co alloy. The electrode pair is made of Cu or Cu alloy.