| 摘要 |
PURPOSE: A vacuum pump is provided to discharge liquid without pressure loss since a sucked liquid is discharged while always being isolated from the outside. CONSTITUTION: A high-vacuum liquid collection device includes a vacuum pump and a liquid separation unit(100). The liquid separation unit has a housing which includes an upper part and a lower part and a plurality of collection cylinders(12a,12b) which connects the upper part and the lower part. Drive rods(15a,15b) penetrating through the collection cylinder is moved up and down. A sensor(18) limits the movement of the drive rod.
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