发明名称 Calibration standard
摘要 The invention relates to a calibration standard, especially for the calibration of devices for the non-destructive measurement of the thickness of thin layers with a carrier plate (16) of a basic material and a standard (17) applied on the carrier plate (16), said standard having the thickness of the layer at which the device is to be calibrated, wherein that a holding device (22) arranged on the basic body (12) of the calibration standard (11) receives at least the standard (17) to the basic body (12) such that upon setting a measuring probe of the device for the non-destructive measurement of thin layers onto the standard (17), its position will be changeable by at least one degree of freedom.
申请公布号 US7784325(B2) 申请公布日期 2010.08.31
申请号 US20060599600 申请日期 2006.11.14
申请人 FISCHER HELMUT 发明人 FISCHER HELMUT
分类号 G01B3/30 主分类号 G01B3/30
代理机构 代理人
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