发明名称 Electronic fuses in semiconductor integrated circuits
摘要 A structure fabrication method. The method includes providing a structure. The structure includes (a) a substrate layer, (b) a first fuse electrode in the substrate layer, and (c) a fuse dielectric layer on the substrate layer and the first fuse electrode. The method further includes (i) forming an opening in the fuse dielectric layer such that the first fuse electrode is exposed to a surrounding ambient through the opening, (ii) forming a fuse region on side walls and bottom walls of the opening such that the fuse region is electrically coupled to the first fuse electrode, and (iii) after said forming the fuse region, filling the opening with a dielectric material.
申请公布号 US7785934(B2) 申请公布日期 2010.08.31
申请号 US20070680131 申请日期 2007.02.28
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HSU LOUIS LU-CHEN;MANDELMAN JACK ALLAN;TONTI WILLIAM ROBERT;YANG CHIH-CHAO
分类号 H01L21/82 主分类号 H01L21/82
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