| 发明名称 |
Encapsulated microcomponent equipped with at least one getter |
| 摘要 |
The invention relates to an encapsulated microcomponent having a cover (3) delimiting a sealed cavity (4) equipped with at least one orifice (5) provided with a plug (6). The plug (6) comprises a getter material portion (6.1) exposed inside the cavity (4). Application in particular in MEMS.
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| 申请公布号 |
US7786561(B2) |
申请公布日期 |
2010.08.31 |
| 申请号 |
US20070774200 |
申请日期 |
2007.07.06 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
PORNIN JEAN-LOUIS;GILLOT CHARLOTTE;BALERAS FRANCOIS |
| 分类号 |
H01L23/20 |
主分类号 |
H01L23/20 |
| 代理机构 |
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代理人 |
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| 地址 |
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