发明名称 |
Apparatus for measuring pressure by using diaphragm and method of pressure measurement by using diaphragm |
摘要 |
The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.
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申请公布号 |
US7784352(B2) |
申请公布日期 |
2010.08.31 |
申请号 |
US20080345054 |
申请日期 |
2008.12.29 |
申请人 |
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE |
发明人 |
HONG SEUNG SOO;SHIN YONG HYEON;KIM JIN TAE |
分类号 |
G01L9/12 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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