发明名称 |
Tunable dielectric radio frequency microelectromechanical system capacitive switch |
摘要 |
The invention is a tunable RF MEMS switch developed with a BST dielectric at the contact interface. BST has a very high dielectric constant (>300) making it very appealing for RF MEMS capacitive switches. The tunable dielectric constant of BST provides a possibility of making linearly tunable MEMS capacitive switches. The capacitive tunable RF MEMS switch with a BST dielectric is disclosed showing its characterization and properties up to 40 GHz.
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申请公布号 |
US7786820(B2) |
申请公布日期 |
2010.08.31 |
申请号 |
US20060374815 |
申请日期 |
2006.03.14 |
申请人 |
NGIMAT CO. |
发明人 |
HUNT ANDREW TYE;PAPAPOLYMEROU IOANNIS (JOHN);POLLEY TODD A.;WANG GUOAN |
分类号 |
H01P5/04 |
主分类号 |
H01P5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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